Micro Electro Mechanical Systems
Scanning Electron Microscope image of a 350 microns long radio frequency microswitch (for frequencies up to 2.0 GHz), developed within ESA Mechanisms Section with a Mecanex (CH) led industrial team.
A polysilicon layer is used for the actuator realisation, while nikel and gold layers are used for the electrical contacts contacts. Electrostatic actuation of the microbridge is implemented.
Scanning Micro-mechanical Mirror Module for fine pointing purposes of optical systems
Scanning Electron Microscope image of the contact pad/beam region of a micromachined end-course detector, magnetically actuated, developed within ESA Mechanisms Section with a Mecanex (CH) led industrial team. Fabrication process includes a single photolithographic step, using a 55 microns thick positive resist photpatterning process. Movable beam dimensions are 1000 microns length, 40 microns height, 14 microns thick. Unit self-testing function via microcoil is included.
Last update: 18 January 2011