High Accuracy Position and Scanning Mechanisms


3 degrees-of-freedom long-stroke / high-resolution tip/tilt mech
 
3 degrees-of-freedom long-stroke / high-resolution tip/tilt mechanism developed by Micromega Dynamics.

6 degrees-of-freedom hexapod
 
Soft Stewart platform. 6 degrees-of-freedom hexapod whose soft legs are provided with sensors and magnetic actuators

OPD and angular jitter requirements
 
OPD and angular jitter requirements are defined through noise shape function between 0.1 mHz and 1 Hz

PAAM Breadboard
 
Left: PAAM Breadboard developed by TNO (NL). Right: PAAM Breadboard developed by RUAG (CH) and CSEM (CH).

PAAM Breadboard
 
PAAM Breadboard

PAAM Breadboard developed by RUAG (CH) and CSEM (CH)
 
PAAM Breadboard developed by RUAG (CH) and CSEM (CH)



Last update: 18 January 2011