High Accuracy Position and Scanning Mechanisms
3 degrees-of-freedom long-stroke / high-resolution tip/tilt mechanism developed by Micromega Dynamics.
Soft Stewart platform. 6 degrees-of-freedom hexapod whose soft legs are provided with sensors and magnetic actuators
OPD and angular jitter requirements are defined through noise shape function between 0.1 mHz and 1 Hz
Left: PAAM Breadboard developed by TNO (NL). Right: PAAM Breadboard developed by RUAG (CH) and CSEM (CH).
PAAM Breadboard developed by RUAG (CH) and CSEM (CH)
Last update: 18 January 2011